Nano planar coil actuated micro paddle resonator for mass detection

Research output: Contribution to journalArticle

Authors

Colleges, School and Institutes

Abstract

A torsional paddle microresonator has been conceived, designed and fabricated to first prototype level. It has demonstrated mass sensitivity that gives the potential for the detection of a range of biowarfare agents ranging from bacterial and other pathogens to the VOCs associated with explosives. This current work reports progress towards the implementation of a Lorentz force electromagnetic actuation system for the resonator, in place of the previously used piezoelectric shaker. A double planar spiral microcoil has been designed to be integrated with the micropaddle and has been prototyped using focused ion beam processing. Its mechanical effect upon the performance of the paddle has been investigated and its electromagnetic characteristics simulated using FEA. The coil self inductance was calculated to be 1.54 x 10(-10) H. (C) 2011 Elsevier B.V. All rights reserved.

Details

Original languageEnglish
Pages (from-to)2229-2232
Number of pages4
JournalMicroelectronic Engineering
Volume88
Issue number8
Publication statusPublished - 1 Aug 2011

Keywords

  • Mass detection, Micro-nano fabrication, Electromagnetic actuation, Micro paddle resonator