Abstract
This paper introduces a simple approach for accurate replication of PDMS thick mould from previous PDMS replicas. The process starts with reinforcing the PDMS mould to provide enough strength for demoulding. Afterwards, the surface of the reinforced PDMS mould was treated with low concentration commercial ceramic surfactants before the replication process. The surfactants are D-3005 and Brij52 and diluted before use. A number of PDMS mould copies have been obtained with excellent dimensional precision. The proposed ceramic surfactants shown to have a good releasing ability, which enabled a clean separation process. (C) 2011 Elsevier B.V. All rights reserved.
Original language | English |
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Pages (from-to) | 3275-3277 |
Number of pages | 3 |
Journal | Microelectronic Engineering |
Volume | 88 |
Issue number | 11 |
DOIs | |
Publication status | Published - 1 Nov 2011 |
Keywords
- Release agent
- Replica
- PDMS