Multiple replication of thick PDMS micropatterns using surfactants as release agents

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Colleges, School and Institutes

Abstract

This paper introduces a simple approach for accurate replication of PDMS thick mould from previous PDMS replicas. The process starts with reinforcing the PDMS mould to provide enough strength for demoulding. Afterwards, the surface of the reinforced PDMS mould was treated with low concentration commercial ceramic surfactants before the replication process. The surfactants are D-3005 and Brij52 and diluted before use. A number of PDMS mould copies have been obtained with excellent dimensional precision. The proposed ceramic surfactants shown to have a good releasing ability, which enabled a clean separation process. (C) 2011 Elsevier B.V. All rights reserved.

Details

Original languageEnglish
Pages (from-to)3275-3277
Number of pages3
JournalMicroelectronic Engineering
Volume88
Issue number11
Publication statusPublished - 1 Nov 2011

Keywords

  • Release agent, Replica, PDMS