Original language | English |
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Pages (from-to) | 183-188 |
Number of pages | 6 |
Journal | Materials Research Society Symposium Proceedings |
Volume | 778 |
Publication status | Published - 1 Jan 2004 |
Microstructure and mechanical properties of nanolayered TiN/Cu thin films
Yau Tse, G Abadias, A Michel, C Tromas, M Jaouen
Research output: Contribution to journal › Article