Microstructure and mechanical properties of nanolayered TiN/Cu thin films

Yau Tse, G Abadias, A Michel, C Tromas, M Jaouen

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)183-188
Number of pages6
JournalMaterials Research Society Symposium Proceedings
Volume778
Publication statusPublished - 1 Jan 2004

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