Microstructure and mechanical properties of nanolayered TiN/Cu thin films

Research output: Contribution to journalArticle

Authors

  • Yau Tse
  • G Abadias
  • A Michel
  • C Tromas
  • M Jaouen

Colleges, School and Institutes

Details

Original languageEnglish
Pages (from-to)183-188
Number of pages6
JournalMaterials Research Society Symposium Proceedings
Volume778
Publication statusPublished - 1 Jan 2004