Micro-opto-electro-mechanical system for X-ray focusing
Research output: Contribution to journal › Article
Colleges, School and Institutes
A MOEMS system for 1-D focusing of X-rays has been fabricated using a thermal bimorph microcantilever to produce an element with variable focal length. A passive strain gauge is incorporated for feedback control of the zoom function. The focal length dependence on bimorph temperature has been measured. (c) 2007 Elsevier B.V. All rights reserved.
|Number of pages||4|
|Publication status||Published - 1 Jan 2007|
- X-ray focusing, MOEMS