Micro-opto-electro-mechanical system for X-ray focusing

Research output: Contribution to journalArticle

Authors

Colleges, School and Institutes

Abstract

A MOEMS system for 1-D focusing of X-rays has been fabricated using a thermal bimorph microcantilever to produce an element with variable focal length. A passive strain gauge is incorporated for feedback control of the zoom function. The focal length dependence on bimorph temperature has been measured. (c) 2007 Elsevier B.V. All rights reserved.

Details

Original languageEnglish
Pages (from-to)1252-1255
Number of pages4
JournalMicroelectronic Engineering
Volume84
Issue number5-8
Publication statusPublished - 1 Jan 2007

Keywords

  • X-ray focusing, MOEMS