Micromachined rectangular coaxial line and cavity resonator for 77GH z applications using SU8 Photoresist

Maolong Ke; Yi Wang; Kyle Jiang; Michael J. Lancaster

doi:10.1109/APMC.2008.4957973

Micromachined rectangular coaxial line and cavity resonator for 77GH z applications using SU8 Photoresist

Maolong Ke^*, Yi Wang, Kyle Jiang, Michael J. Lancaster

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Citations (Scopus)

Abstract

Thick SU8 photoresist technique is used to fabricate two millimetre-wave components. Firstly, an air-filled rectangular coaxial line operating from 55 to 87 GH_z is fabricated and tested, and an insertion loss of 0.8dB and return loss of better than-15dB was obtained. The overall measured responses agree well with full-wave simulation results. Secondly, a cavity resonator operating at 77GH_z is reported. An unloaded Q value of 569 was obtained, which is, to our knowledge, one of the best reported so far in a similar structure.

Original language	English
Title of host publication	Proceedings of 2008 Asia Pacific Microwave Conference, APMC 2008
DOIs	https://doi.org/10.1109/APMC.2008.4957973
Publication status	Published - 1 Dec 2008
Event	2008 Asia Pacific Microwave Conference, APMC 2008 - Hong Kong, China Duration: 16 Dec 2008 → 20 Dec 2008

Conference

Conference	2008 Asia Pacific Microwave Conference, APMC 2008
Country/Territory	China
City	Hong Kong
Period	16/12/08 → 20/12/08

ASJC Scopus subject areas

Computer Networks and Communications
Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/APMC.2008.4957973

Cite this

@inproceedings{43633902921d4036bd75ab8b4515c66f,

title = "Micromachined rectangular coaxial line and cavity resonator for 77GH z applications using SU8 Photoresist",

abstract = "Thick SU8 photoresist technique is used to fabricate two millimetre-wave components. Firstly, an air-filled rectangular coaxial line operating from 55 to 87 GHz is fabricated and tested, and an insertion loss of 0.8dB and return loss of better than-15dB was obtained. The overall measured responses agree well with full-wave simulation results. Secondly, a cavity resonator operating at 77GHz is reported. An unloaded Q value of 569 was obtained, which is, to our knowledge, one of the best reported so far in a similar structure.",

author = "Maolong Ke and Yi Wang and Kyle Jiang and Lancaster, {Michael J.}",

year = "2008",

month = dec,

day = "1",

doi = "10.1109/APMC.2008.4957973",

language = "English",

isbn = "9781424426423",

booktitle = "Proceedings of 2008 Asia Pacific Microwave Conference, APMC 2008",

note = "2008 Asia Pacific Microwave Conference, APMC 2008 ; Conference date: 16-12-2008 Through 20-12-2008",

}

TY - GEN

T1 - Micromachined rectangular coaxial line and cavity resonator for 77GH z applications using SU8 Photoresist

AU - Ke, Maolong

AU - Wang, Yi

AU - Jiang, Kyle

AU - Lancaster, Michael J.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - Thick SU8 photoresist technique is used to fabricate two millimetre-wave components. Firstly, an air-filled rectangular coaxial line operating from 55 to 87 GHz is fabricated and tested, and an insertion loss of 0.8dB and return loss of better than-15dB was obtained. The overall measured responses agree well with full-wave simulation results. Secondly, a cavity resonator operating at 77GHz is reported. An unloaded Q value of 569 was obtained, which is, to our knowledge, one of the best reported so far in a similar structure.

AB - Thick SU8 photoresist technique is used to fabricate two millimetre-wave components. Firstly, an air-filled rectangular coaxial line operating from 55 to 87 GHz is fabricated and tested, and an insertion loss of 0.8dB and return loss of better than-15dB was obtained. The overall measured responses agree well with full-wave simulation results. Secondly, a cavity resonator operating at 77GHz is reported. An unloaded Q value of 569 was obtained, which is, to our knowledge, one of the best reported so far in a similar structure.

UR - http://www.scopus.com/inward/record.url?scp=69649097305&partnerID=8YFLogxK

U2 - 10.1109/APMC.2008.4957973

DO - 10.1109/APMC.2008.4957973

M3 - Conference contribution

AN - SCOPUS:69649097305

SN - 9781424426423

BT - Proceedings of 2008 Asia Pacific Microwave Conference, APMC 2008

T2 - 2008 Asia Pacific Microwave Conference, APMC 2008

Y2 - 16 December 2008 through 20 December 2008

ER -

Micromachined rectangular coaxial line and cavity resonator for 77GH z applications using SU8 Photoresist

Abstract

Conference

ASJC Scopus subject areas

Access to Document

Fingerprint

Cite this