Micromachined rectangular coaxial line and cavity resonator for 77GH z applications using SU8 Photoresist

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Thick SU8 photoresist technique is used to fabricate two millimetre-wave components. Firstly, an air-filled rectangular coaxial line operating from 55 to 87 GHz is fabricated and tested, and an insertion loss of 0.8dB and return loss of better than-15dB was obtained. The overall measured responses agree well with full-wave simulation results. Secondly, a cavity resonator operating at 77GHz is reported. An unloaded Q value of 569 was obtained, which is, to our knowledge, one of the best reported so far in a similar structure.


Original languageEnglish
Title of host publicationProceedings of 2008 Asia Pacific Microwave Conference, APMC 2008
Publication statusPublished - 1 Dec 2008
Event2008 Asia Pacific Microwave Conference, APMC 2008 - Hong Kong, China
Duration: 16 Dec 200820 Dec 2008


Conference2008 Asia Pacific Microwave Conference, APMC 2008
CityHong Kong