Micromachined Air-Filled Patch Antennas for Millimeter-Wave Applications

Yi Wang; Mao Ke; Michael Lancaster

doi:10.1002/mop.25183

Micromachined Air-Filled Patch Antennas for Millimeter-Wave Applications

Yi Wang, Mao Ke, Michael Lancaster

Electronic, Electrical and Systems Engineering

Research output: Contribution to journal › Article

4 Citations (Scopus)

Abstract

Air-filled patch antennas for millimeter-wave (mm-wave) applications are demonstrated using silicon-based micromachining techniques. The antennas are fed by rectangular coaxial lines and made of five gold plated layers bonded together. Each layer is tirade by deep reactive etching on silicon. The patches are suspended by stubs. without using any dielectric materials. The dielectric free structure not only avoids dielectric losses but also eliminates spurious surface modes that often trouble substrate supported patch antennas at mm-wave frequencies. The predicted gain of the patch is as high as 9.4 dBi with a patch dimension of 3.27 mm by 3.54 mm at 33 GHz. A radiation pattern measurement has been performed and results shown. (C) 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 1345-1347, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.25183

Original language	English
Pages (from-to)	1345-1347
Number of pages	3
Journal	Microwave and Optical Technology Letters
Volume	52
Issue number	6
DOIs	https://doi.org/10.1002/mop.25183
Publication status	Published - 1 Jun 2010

Keywords

micromachining
millimeter-wave antenna

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10.1002/mop.25183

Terahertz Micromachined Resonator Superstructures
Lancaster, M., Gardner, P. & Huang, F.
Engineering & Physical Science Research Council
1/06/10 → 30/11/13
Project: Research Councils
Millimetre Wave Micromachined Devices for Communications and Radar
Lancaster, M., Jiang, K., Gardner, P., Hall, P., Huang, F. & Prewett, P.
Engineering & Physical Science Research Council
1/12/06 → 31/05/10
Project: Research Councils

Cite this

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title = "Micromachined Air-Filled Patch Antennas for Millimeter-Wave Applications",

abstract = "Air-filled patch antennas for millimeter-wave (mm-wave) applications are demonstrated using silicon-based micromachining techniques. The antennas are fed by rectangular coaxial lines and made of five gold plated layers bonded together. Each layer is tirade by deep reactive etching on silicon. The patches are suspended by stubs. without using any dielectric materials. The dielectric free structure not only avoids dielectric losses but also eliminates spurious surface modes that often trouble substrate supported patch antennas at mm-wave frequencies. The predicted gain of the patch is as high as 9.4 dBi with a patch dimension of 3.27 mm by 3.54 mm at 33 GHz. A radiation pattern measurement has been performed and results shown. (C) 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 1345-1347, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.25183",

keywords = "micromachining, millimeter-wave antenna",

author = "Yi Wang and Mao Ke and Michael Lancaster",

year = "2010",

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doi = "10.1002/mop.25183",

language = "English",

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pages = "1345--1347",

journal = "Microwave and Optical Technology Letters",

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T1 - Micromachined Air-Filled Patch Antennas for Millimeter-Wave Applications

AU - Wang, Yi

AU - Ke, Mao

AU - Lancaster, Michael

PY - 2010/6/1

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N2 - Air-filled patch antennas for millimeter-wave (mm-wave) applications are demonstrated using silicon-based micromachining techniques. The antennas are fed by rectangular coaxial lines and made of five gold plated layers bonded together. Each layer is tirade by deep reactive etching on silicon. The patches are suspended by stubs. without using any dielectric materials. The dielectric free structure not only avoids dielectric losses but also eliminates spurious surface modes that often trouble substrate supported patch antennas at mm-wave frequencies. The predicted gain of the patch is as high as 9.4 dBi with a patch dimension of 3.27 mm by 3.54 mm at 33 GHz. A radiation pattern measurement has been performed and results shown. (C) 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 1345-1347, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.25183

AB - Air-filled patch antennas for millimeter-wave (mm-wave) applications are demonstrated using silicon-based micromachining techniques. The antennas are fed by rectangular coaxial lines and made of five gold plated layers bonded together. Each layer is tirade by deep reactive etching on silicon. The patches are suspended by stubs. without using any dielectric materials. The dielectric free structure not only avoids dielectric losses but also eliminates spurious surface modes that often trouble substrate supported patch antennas at mm-wave frequencies. The predicted gain of the patch is as high as 9.4 dBi with a patch dimension of 3.27 mm by 3.54 mm at 33 GHz. A radiation pattern measurement has been performed and results shown. (C) 2010 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 1345-1347, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.25183

KW - micromachining

KW - millimeter-wave antenna

U2 - 10.1002/mop.25183

DO - 10.1002/mop.25183

M3 - Article

SN - 1098-2760

VL - 52

SP - 1345

EP - 1347

JO - Microwave and Optical Technology Letters

JF - Microwave and Optical Technology Letters

IS - 6

ER -

Micromachined Air-Filled Patch Antennas for Millimeter-Wave Applications

Abstract

Keywords

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Projects

Terahertz Micromachined Resonator Superstructures

Millimetre Wave Micromachined Devices for Communications and Radar

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