Abstract
A micromachined 300-GHz slotted waveguide antenna is demonstrated using a simple fabrication technique based on metal-coated SU-8 thick resist. The antenna is designed to be built from a four-layer structure of equal layer thickness. It is fully characterized, and the measured radiation patterns show excellent agreement with the simulation. An H-plane matched right-angle bend is integrated in the antenna in order to achieve reliable and accurate connection with standard waveguide flange. The micromachined antenna is directional and low-profile and may find applications in low-cost sensors and radars.
Original language | English |
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Pages (from-to) | 573 |
Number of pages | 1 |
Journal | IEEE Antennas and Wireless Propagation Letters |
Volume | 10 |
Publication status | Published - 1 Jan 2011 |