Micro-Fabrication of Ceramics: Additive Manufacturing and Conventional Technologies

Research output: Contribution to journalArticlepeer-review

Authors

  • Hany Hassanin
  • Amr M. Elshaer
  • M Imbaby
  • Heba El-Mongy
  • Tamer El-Sayed

Colleges, School and Institutes

External organisations

  • University of Liverpool
  • Aston University
  • Kingston University
  • Helwan University

Abstract

Ceramic materials are increasingly used in Micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of additive manufacturing, the use of ceramics for functional and structural MEMS raises new opportunities and challenges. This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS, including additive and conventional manufacturing technologies. The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles, main features, and processed materials. Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers, post-processing at the micro-level, resolution, and quality control. The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications, which indicates a promising future.

Details

Original languageEnglish
JournalJournal of Advanced Ceramics
Publication statusPublished - 9 Sep 2020

Keywords

  • MEMS, Micro-fabrication, ceramics, Micro parts, Additive manufacturing