Mechanical Characterization of Torsional Micropaddles Using Atomic Force Microscopy

Research output: Contribution to journalArticlepeer-review

External organisations

  • University of Birmingham
  • Open University

Abstract

The reference cantilever method is shown to act as a direct and simple method for determination of torsional spring constant. It has been applied to the characterization of micropaddle structures similar to those proposed for resonant functionalized chemical sensors and resonant thermal detectors. It is shown that this method can be used as an effective procedure to characterize a key parameter of these devices and would be applicable to characterization of other similar MEMS/NEMS devices such as micromirrors. In this study, two sets of micropaddles are manufactured (beams at centre and offset by 2.5 μm) by using LPCVD silicon nitride as a substrate. The patterning is made by direct milling using focused ion beam. The torsional spring constant is achieved through micromechanical analysis via atomic force microscopy. To obtain the gradient of force curve, the area of the micropaddle is scanned and the behaviour of each pixel is investigated through an automated developed code. The experimental results are in a good agreement with theoretical results.

Details

Original languageEnglish
Article number6160907
Pages (from-to)1-7
JournalJournal of Sensors
Volume2018
Publication statusPublished - 7 Aug 2018