Measurement of dynamic properties of small volumes of fluid using MEMS

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Colleges, School and Institutes


A model based on the response of a micro-rheometer which permits the measurement of the linear viscoelastic properties of small volumes of a fluid is described. The configuration involves a liquid being contained within a capillary bridge between two flat smooth parallel platens that are actuated sinusoidally using a compliant MEMS device. Approximate closed-form equations are derived to analyse the data taking account of both the capillary forces and those arising from viscoelastic flow. The approximate theory is compared to a full numerical simulation of the response of the MEMS rheometer and the validity is discussed. (c) 2007 Elsevier B.V. All rights reserved.


Original languageEnglish
Pages (from-to)701-706
Number of pages6
JournalSensors and Actuators B: Chemical
Issue number2
Publication statusPublished - 28 Mar 2008


  • squeeze flow, MEMS, viscoelastic properties, capillary bridges, complex fluid