Master Tool Fabrication for the replication of micro and nano features

H Hirshy, G Lalev, VL Velkova, K Popov, S Scholz, Stefan Dimov

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 1 Jan 2011
Event	8th International Conference on Multi-Material Micro Manufacture - Duration: 1 Jan 2011 → …

Conference	8th International Conference on Multi-Material Micro Manufacture
Period	1/01/11 → …

Cite this

@conference{6e51885455854bf5a28c699dd394c4d4,

title = "Master Tool Fabrication for the replication of micro and nano features",

author = "H Hirshy and G Lalev and VL Velkova and K Popov and S Scholz and Stefan Dimov",

year = "2011",

month = jan,

day = "1",

language = "English",

note = "8th International Conference on Multi-Material Micro Manufacture ; Conference date: 01-01-2011",

}