Length scale integration:  Implementation of a new process chain for producing replication masters with micro and nano scale features

P Vella, Stefan Dimov, EB Brousseau, E Minev, T Dobrev, P Petkov, V Velkova

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Pages	310-313
Number of pages	4
Publication status	Published - 1 Jan 2011
Event	8th International Conference onMulti-Material Micro Manufacture - Duration: 1 Jan 2011 → …

Conference	8th International Conference onMulti-Material Micro Manufacture
Period	1/01/11 → …

Cite this

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title = "Length scale integration: Implementation of a new process chain for producing replication masters with micro and nano scale features",

author = "P Vella and Stefan Dimov and EB Brousseau and E Minev and T Dobrev and P Petkov and V Velkova",

year = "2011",

month = jan,

day = "1",

language = "English",

pages = "310--313",

note = "8th International Conference onMulti-Material Micro Manufacture ; Conference date: 01-01-2011",

}

TY - CONF

T1 - Length scale integration: Implementation of a new process chain for producing replication masters with micro and nano scale features

AU - Vella, P

AU - Dimov, Stefan

AU - Brousseau, EB

AU - Minev, E

AU - Dobrev, T

AU - Petkov, P

AU - Velkova, V

PY - 2011/1/1

Y1 - 2011/1/1

M3 - Paper

SP - 310

EP - 313

T2 - 8th International Conference onMulti-Material Micro Manufacture

Y2 - 1 January 2011

ER -