Irresistible Materials multi-trigger resist: the journey towards high volume manufacturing readiness

Warren Montgomery; Alexandra McClelland; David Ure; John Roth; Alexander Robinson

doi:10.1117/12.2258092

Irresistible Materials multi-trigger resist: the journey towards high volume manufacturing readiness

Warren Montgomery, Alexandra McClelland, David Ure, John Roth, Alexander Robinson

Chemical Engineering

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6 Citations (Scopus)

326 Downloads (Pure)

Abstract

Irresistible Materials (IM) is a UK company spun out of the University of Birmingham. It is developing novel resist systems based on the Multi-trigger concept, and spin-on-carbon hardmask materials. IM has developed a new EUV resist that is nonmetal based, does not need a post exposure bake (PEB), and delivers high sensitivity, excellent contact hole resolution, with low LER. It is being readied for HVM through a partnership with Nano-C, Inc. (the Massachusetts based manufacturer of advanced electronic materials and chemicals). The transition to scalability will be the highlight of this discussion.

Original language	English
Article number	1014328
Number of pages	13
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	10143
DOIs	https://doi.org/10.1117/12.2258092
Publication status	Published - 18 May 2017

Keywords

EUV Photoresist
resolution
molecular
contacts holes
volume manufacturing
high resolution

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10.1117/12.2258092Licence: Creative Commons: Attribution (CC BY)

1014328Final published version, 1.01 MBLicence: Creative Commons: Attribution (CC BY)

Cite this

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abstract = "Irresistible Materials (IM) is a UK company spun out of the University of Birmingham. It is developing novel resist systems based on the Multi-trigger concept, and spin-on-carbon hardmask materials. IM has developed a new EUV resist that is nonmetal based, does not need a post exposure bake (PEB), and delivers high sensitivity, excellent contact hole resolution, with low LER. It is being readied for HVM through a partnership with Nano-C, Inc. (the Massachusetts based manufacturer of advanced electronic materials and chemicals). The transition to scalability will be the highlight of this discussion.",

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AU - Montgomery, Warren

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AU - Ure, David

AU - Roth, John

AU - Robinson, Alexander

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AB - Irresistible Materials (IM) is a UK company spun out of the University of Birmingham. It is developing novel resist systems based on the Multi-trigger concept, and spin-on-carbon hardmask materials. IM has developed a new EUV resist that is nonmetal based, does not need a post exposure bake (PEB), and delivers high sensitivity, excellent contact hole resolution, with low LER. It is being readied for HVM through a partnership with Nano-C, Inc. (the Massachusetts based manufacturer of advanced electronic materials and chemicals). The transition to scalability will be the highlight of this discussion.

KW - EUV Photoresist

KW - resolution

KW - molecular

KW - contacts holes

KW - volume manufacturing

KW - high resolution

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 1014328

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Irresistible Materials multi-trigger resist: the journey towards high volume manufacturing readiness

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Keywords

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