Irresistible Materials multi-trigger resist: the journey towards high volume manufacturing readiness
Research output: Contribution to journal › Article › peer-review
Authors
Colleges, School and Institutes
External organisations
- IRRESISTIBLE MATERIALS LTD
- IRRESISTIBLE MATERIALS LTD
- Nano-C, Inc.
Abstract
Irresistible Materials (IM) is a UK company spun out of the University of Birmingham. It is developing novel resist systems based on the Multi-trigger concept, and spin-on-carbon hardmask materials. IM has developed a new EUV resist that is nonmetal based, does not need a post exposure bake (PEB), and delivers high sensitivity, excellent contact hole resolution, with low LER. It is being readied for HVM through a partnership with Nano-C, Inc. (the Massachusetts based manufacturer of advanced electronic materials and chemicals). The transition to scalability will be the highlight of this discussion.
Details
| Original language | English |
|---|---|
| Article number | 1014328 |
| Number of pages | 13 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 10143 |
| Publication status | Published - 18 May 2017 |
Keywords
- EUV Photoresist, resolution, molecular, contacts holes, volume manufacturing, high resolution