Investigation of a new process chain based on atomic force microscopy scratching

V Saile, K Ehmann, Stefan Dimov

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 1 Jan 2009
Event	5th International Conference on Multi-Material Micro Manufacture - Duration: 1 Jan 2009 → …

Conference	5th International Conference on Multi-Material Micro Manufacture
Period	1/01/09 → …

Cite this

@conference{2f154d130f064b3790f2c11a56d682f6,

title = "Investigation of a new process chain based on atomic force microscopy scratching",

author = "V Saile and K Ehmann and Stefan Dimov",

year = "2009",

month = jan,

day = "1",

language = "English",

note = "5th International Conference on Multi-Material Micro Manufacture ; Conference date: 01-01-2009",

}