Original language | English |
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Pages (from-to) | 113519-1-13 |
Journal | Journal of Applied Physics |
Volume | 99 |
Issue number | 11 |
DOIs | |
Publication status | Published - 1 Jan 2006 |
Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering
G Abadias, Yau Tse, PH Guerin, V Pelosin
Research output: Contribution to journal › Article
109
Citations
(Scopus)