Instabilities in Focused Ion Beam-patterned Au nanowires

Research output: Contribution to journalArticlepeer-review

Authors

Colleges, School and Institutes

Abstract

Focused Ion Beam (FIB) technology has become an indispensable enabling tool for micro nano fabrications. One important application is to use FIB for patterning conducting nanowires of metals down to a few tens of nanometre for applications such as interconnects, heaters and temperature nanosensors. A series of experiments on Au nanowires fabricated by FIB on SixNy membrane show that nanowires with width

Details

Original languageEnglish
Pages (from-to)2840-2843
Number of pages4
JournalMicroelectron Engineering
Volume88
Issue number9
Early online date12 May 2011
Publication statusPublished - 1 Sep 2011

Keywords

  • Focused Ion Beam, Nanowire, Rayleigh-Plateau instability