Original language | English |
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Pages | 368-371 |
Number of pages | 4 |
Publication status | Published - 1 Jan 2010 |
Event | 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) - Duration: 1 Jan 2010 → … |
Conference
Conference | 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) |
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Period | 1/01/10 → … |