FIB sputtering optimization using ion reverse software

Research output: Contribution to journalArticle

Authors

  • S Zaitzev
  • A Svintsov
  • G Lalev
  • V Valkova
  • H Hirshy

Colleges, School and Institutes

Details

Original languageEnglish
Pages (from-to)544-547
Number of pages4
JournalMicroelectronic Engineering
Volume86
Issue number4-6
Publication statusPublished - 1 Jan 2009