Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

Research output: Contribution to conference (unpublished)Paper

Authors

Colleges, School and Institutes

Details

Original languageEnglish
Publication statusPublished - 1 Sep 2001
Event26th International Conference on Micro- and Nano-Engineering, Sep 18-21, 2000. JENA, Germany -
Duration: 1 Sep 2001 → …

Conference

Conference26th International Conference on Micro- and Nano-Engineering, Sep 18-21, 2000. JENA, Germany
Period1/09/01 → …

Keywords

  • silicon nanopillars, fabrication, natural lithography, nanostructures