Fabrication of Ni-Al2O3 composite microcomponent by electroforming

Research output: Contribution to journalArticle

Colleges, School and Institutes

Abstract

Thick nickel-alumina (Ni-Al2O3) composite microcomponents containing dispersed alumina nanoparticles were fabricated by a combination of UV lithography and electroforming, using Shipley BPR100 resist to fabricate the micromoulds. Tests show that the microhardness of composite microcomponents is significantly improved over that of electroformed pure nickel components and that the structures maintain good fidelity. The method has potential for the fabrication of hard wearing microcomponents for micromachines and other applications. (c) 2007 Published by Elsevier B.V.

Details

Original languageEnglish
Pages (from-to)1256-1259
Number of pages4
JournalMicroelectronic Engineering
Volume84
Issue number5-8
Publication statusPublished - 1 Jan 2007

Keywords

  • electroforming, alumina nanoparticles, microcomponent