Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

Research output: Contribution to journalArticle

Authors

Colleges, School and Institutes

Details

Original languageEnglish
Pages (from-to)853-855
Number of pages3
JournalMicroelectronic Engineering
Volume85
Issue number5-6
Publication statusPublished - 1 Jan 2008