Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

J Kettle, RT Hoyle, Stefan Dimov, RM Perks

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)853-855
Number of pages3
JournalMicroelectronic Engineering
Volume85
Issue number5-6
Publication statusPublished - 1 Jan 2008

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