Fabrication and validation of fused silica NIL templates incorporating different length scale features

Research output: Contribution to journalArticle

Authors

  • G Lalev
  • P Petkov
  • N Sykes
  • H Hirshy
  • V Velkova
  • D Barrow

Colleges, School and Institutes

Details

Original languageEnglish
Pages (from-to)705-708
Number of pages4
JournalMicroelectronic Engineering
Volume86
Issue number4-6
Publication statusPublished - 1 Jan 2009