Fabrication and analysis of cylindrical resin AFM microcantilevers

David Cheneler; James Bowen; SJ Leigh; CP Purssell; DR Billson; DA Hutchins; Michael Ward

doi:10.1016/j.ultramic.2011.03.009

Fabrication and analysis of cylindrical resin AFM microcantilevers

David Cheneler, James Bowen, SJ Leigh, CP Purssell, DR Billson, DA Hutchins, Michael Ward

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2 Citations (Scopus)

Abstract

In this paper a new method of fabricating cylindrical resin microcantilevers using the Direct Digital Manufacturing (DDM) technique of Micro-stereolithography (MSL) is described. The method is rapid and commercially viable, allowing the fabrication of atomic force microscope (AFM) cantilevers which exhibit much larger spring constants than those currently commercial available. This allows for experimentation in a force regime orders of magnitude higher than currently possible using the AFM. This makes these cantilevers ideally suited for AFM-based depth sensing indentation. Due to their geometry, the assumptions used in the standard Euler-Bernoulli beam theory usually used to analyse AFM cantilevers may no longer be valid. Therefore approximate analytical solutions based on Timoshenko beam theory have been derived for the stiffness and resonant frequency of these cantilevers. Prototypes of the cantilevers have been fabricated and tested. Results show good agreement between experiment and theory.

Original language	English
Pages (from-to)	1214-1223
Number of pages	10
Journal	Ultramicroscopy
Volume	111
Issue number	8
DOIs	https://doi.org/10.1016/j.ultramic.2011.03.009
Publication status	Published - 1 Jul 2011

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title = "Fabrication and analysis of cylindrical resin AFM microcantilevers",

abstract = "In this paper a new method of fabricating cylindrical resin microcantilevers using the Direct Digital Manufacturing (DDM) technique of Micro-stereolithography (MSL) is described. The method is rapid and commercially viable, allowing the fabrication of atomic force microscope (AFM) cantilevers which exhibit much larger spring constants than those currently commercial available. This allows for experimentation in a force regime orders of magnitude higher than currently possible using the AFM. This makes these cantilevers ideally suited for AFM-based depth sensing indentation. Due to their geometry, the assumptions used in the standard Euler-Bernoulli beam theory usually used to analyse AFM cantilevers may no longer be valid. Therefore approximate analytical solutions based on Timoshenko beam theory have been derived for the stiffness and resonant frequency of these cantilevers. Prototypes of the cantilevers have been fabricated and tested. Results show good agreement between experiment and theory.",

author = "David Cheneler and James Bowen and SJ Leigh and CP Purssell and DR Billson and DA Hutchins and Michael Ward",

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T1 - Fabrication and analysis of cylindrical resin AFM microcantilevers

AU - Cheneler, David

AU - Bowen, James

AU - Leigh, SJ

AU - Purssell, CP

AU - Billson, DR

AU - Hutchins, DA

AU - Ward, Michael

PY - 2011/7/1

Y1 - 2011/7/1

N2 - In this paper a new method of fabricating cylindrical resin microcantilevers using the Direct Digital Manufacturing (DDM) technique of Micro-stereolithography (MSL) is described. The method is rapid and commercially viable, allowing the fabrication of atomic force microscope (AFM) cantilevers which exhibit much larger spring constants than those currently commercial available. This allows for experimentation in a force regime orders of magnitude higher than currently possible using the AFM. This makes these cantilevers ideally suited for AFM-based depth sensing indentation. Due to their geometry, the assumptions used in the standard Euler-Bernoulli beam theory usually used to analyse AFM cantilevers may no longer be valid. Therefore approximate analytical solutions based on Timoshenko beam theory have been derived for the stiffness and resonant frequency of these cantilevers. Prototypes of the cantilevers have been fabricated and tested. Results show good agreement between experiment and theory.

AB - In this paper a new method of fabricating cylindrical resin microcantilevers using the Direct Digital Manufacturing (DDM) technique of Micro-stereolithography (MSL) is described. The method is rapid and commercially viable, allowing the fabrication of atomic force microscope (AFM) cantilevers which exhibit much larger spring constants than those currently commercial available. This allows for experimentation in a force regime orders of magnitude higher than currently possible using the AFM. This makes these cantilevers ideally suited for AFM-based depth sensing indentation. Due to their geometry, the assumptions used in the standard Euler-Bernoulli beam theory usually used to analyse AFM cantilevers may no longer be valid. Therefore approximate analytical solutions based on Timoshenko beam theory have been derived for the stiffness and resonant frequency of these cantilevers. Prototypes of the cantilevers have been fabricated and tested. Results show good agreement between experiment and theory.

U2 - 10.1016/j.ultramic.2011.03.009

DO - 10.1016/j.ultramic.2011.03.009

M3 - Article

C2 - 21763665

VL - 111

SP - 1214

EP - 1223

JO - Ultramicroscopy

JF - Ultramicroscopy

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Fabrication and analysis of cylindrical resin AFM microcantilevers

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