Original language | English |
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Journal | Chemical Physics Letters |
DOIs | |
Publication status | Published - 1999 |
Exposure mechanism of fullerene derivative electron beam resists
A.P.G. Robinson, R.E. Palmer, T. Tada, T. Kanayama, E.J. Shelley, D. Philp, J.A. Preece
Research output: Contribution to journal › Article › peer-review
26
Citations
(Scopus)