Effects of particle size on soft lithography process, the green and sintered micro alumina parts

Research output: Contribution to journalArticlepeer-review

Colleges, School and Institutes


Alumina micro parts were fabricated using powders in particle sizes of 1 μm, 2.0 μm, and 12.0 μm. The effects of particle size on soft lithography process, green bodies, and sintered characteristics were investigated, including process parameters affecting homogeneous and smooth surface. The effects of particle size were analyzed through suspensions, green, and sintered properties. It was found that the stability of suspensions, sintered density, Vickers micro hardness, surface roughness and edges resolution are significantly improved with the decrease in particle size. On the other hand, suspension viscosity, green density and shrinkage are degraded with the use of finer particles.


Original languageEnglish
Pages (from-to)1014-1022
Number of pages9
JournalInternational Journal of Applied Ceramic Technology
Issue number6
Publication statusPublished - 1 Nov 2013