Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture

Research output: Contribution to journalArticle

Authors

Colleges, School and Institutes

Details

Original languageEnglish
Pages (from-to)2414-2428
Number of pages15
JournalJournal of Applied Physics
Volume95
Issue number5
Publication statusPublished - 1 Jan 2004