Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture

G Abadias; Yau Tse

doi:10.1063/1.1646444

Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture

G Abadias, Yau Tse

Metallurgy and Materials

Research output: Contribution to journal › Article

73 Citations (Scopus)

Original language	English
Pages (from-to)	2414-2428
Number of pages	15
Journal	Journal of Applied Physics
Volume	95
Issue number	5
DOIs	https://doi.org/10.1063/1.1646444
Publication status	Published - 1 Jan 2004

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10.1063/1.1646444

Cite this

@article{d7a1726bfebe4ef283c0410c18b0a1ec,

title = "Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture",

author = "G Abadias and Yau Tse",

year = "2004",

month = jan,

day = "1",

doi = "10.1063/1.1646444",

language = "English",

volume = "95",

pages = "2414--2428",

journal = "Journal of Applied Physics",

publisher = "American Institute of Physics",

number = "5",

}

TY - JOUR

T1 - Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture

AU - Abadias, G

AU - Tse, Yau

PY - 2004/1/1

Y1 - 2004/1/1

U2 - 10.1063/1.1646444

DO - 10.1063/1.1646444

M3 - Article

VL - 95

SP - 2414

EP - 2428

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 5

ER -