Dielectric characterization of a ferroelectric film in the sub-GHz region

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Colleges, School and Institutes

Abstract

A new method is proposed for the measurement of the dielectric properties of BaxSr1-xTiO3 (BST) thin films in the frequency range 10(6)-1.8 x 10(9) Hz. A co-planar waveguide (CPW) transmission line was employed for impedance measurements via on-wafer probing. The measured impedance of the CPW line was found as a function of the probing position on the line. A simplified model of the CPW line under test allows the intrinsic dielectric properties of BST thin films to be extracted from the measured position-dependent impedance. Experimental results obtained by this new method agree well with those obtained by two-port S-parameters measurement at microwave frequencies using the same CPW structure.

Details

Original languageEnglish
Pages (from-to)185410-
JournalJournal of Physics D: Applied Physics
Volume41
Issue number18
Early online date28 Aug 2008
Publication statusPublished - 21 Sep 2008