Dielectric characterization of a ferroelectric film in the sub-GHz region
Research output: Contribution to journal › Article
Colleges, School and Institutes
A new method is proposed for the measurement of the dielectric properties of BaxSr1-xTiO3 (BST) thin films in the frequency range 10(6)-1.8 x 10(9) Hz. A co-planar waveguide (CPW) transmission line was employed for impedance measurements via on-wafer probing. The measured impedance of the CPW line was found as a function of the probing position on the line. A simplified model of the CPW line under test allows the intrinsic dielectric properties of BST thin films to be extracted from the measured position-dependent impedance. Experimental results obtained by this new method agree well with those obtained by two-port S-parameters measurement at microwave frequencies using the same CPW structure.
|Journal||Journal of Physics D: Applied Physics|
|Early online date||28 Aug 2008|
|Publication status||Published - 21 Sep 2008|