Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

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Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger. / Muhammad, Haseena; Oddo, CM; Beccai, L; Recchiuto, C; Anthony, Carl; Adams, Michael; Carrozza, MC; Hukins, David; Ward, Michael.

In: Sensors and Actuators A: Physical, Vol. 165, No. 2, 01.02.2011, p. 221-229.

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@article{b4f8716e23ff4812afb5ab458cd4f5c9,
title = "Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger",
abstract = "This paper presents the development of a MEMS based capacitive tactile sensor intended to be incorporated into a tactile array as the core element of a biomimetic fingerpad. The use of standard microfabrication technologies in realising the device allowed a cost efficient fabrication involving only a few process steps. A low noise readout electronics system was developed for measuring the sensor response. The performance of both bare and packaged sensors was evaluated by direct probing of individual capacitive sensor units and characterising their response to load-unload indentation cycles. (C) 2010 Elsevier B.V. All rights reserved.",
keywords = "Tactile sensor, MEMS, Capacitive sensor, Biomimetic",
author = "Haseena Muhammad and CM Oddo and L Beccai and C Recchiuto and Carl Anthony and Michael Adams and MC Carrozza and David Hukins and Michael Ward",
year = "2011",
month = feb,
day = "1",
doi = "10.1016/j.sna.2010.10.025",
language = "English",
volume = "165",
pages = "221--229",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "2",

}

RIS

TY - JOUR

T1 - Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

AU - Muhammad, Haseena

AU - Oddo, CM

AU - Beccai, L

AU - Recchiuto, C

AU - Anthony, Carl

AU - Adams, Michael

AU - Carrozza, MC

AU - Hukins, David

AU - Ward, Michael

PY - 2011/2/1

Y1 - 2011/2/1

N2 - This paper presents the development of a MEMS based capacitive tactile sensor intended to be incorporated into a tactile array as the core element of a biomimetic fingerpad. The use of standard microfabrication technologies in realising the device allowed a cost efficient fabrication involving only a few process steps. A low noise readout electronics system was developed for measuring the sensor response. The performance of both bare and packaged sensors was evaluated by direct probing of individual capacitive sensor units and characterising their response to load-unload indentation cycles. (C) 2010 Elsevier B.V. All rights reserved.

AB - This paper presents the development of a MEMS based capacitive tactile sensor intended to be incorporated into a tactile array as the core element of a biomimetic fingerpad. The use of standard microfabrication technologies in realising the device allowed a cost efficient fabrication involving only a few process steps. A low noise readout electronics system was developed for measuring the sensor response. The performance of both bare and packaged sensors was evaluated by direct probing of individual capacitive sensor units and characterising their response to load-unload indentation cycles. (C) 2010 Elsevier B.V. All rights reserved.

KW - Tactile sensor

KW - MEMS

KW - Capacitive sensor

KW - Biomimetic

U2 - 10.1016/j.sna.2010.10.025

DO - 10.1016/j.sna.2010.10.025

M3 - Article

VL - 165

SP - 221

EP - 229

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

IS - 2

ER -