Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

Research output: Contribution to journalArticle


  • Haseena Muhammad
  • CM Oddo
  • L Beccai
  • C Recchiuto
  • MC Carrozza

Colleges, School and Institutes


This paper presents the development of a MEMS based capacitive tactile sensor intended to be incorporated into a tactile array as the core element of a biomimetic fingerpad. The use of standard microfabrication technologies in realising the device allowed a cost efficient fabrication involving only a few process steps. A low noise readout electronics system was developed for measuring the sensor response. The performance of both bare and packaged sensors was evaluated by direct probing of individual capacitive sensor units and characterising their response to load-unload indentation cycles. (C) 2010 Elsevier B.V. All rights reserved.


Original languageEnglish
Pages (from-to)221-229
Number of pages9
JournalSensors and Actuators A: Physical
Issue number2
Publication statusPublished - 1 Feb 2011


  • Tactile sensor, MEMS, Capacitive sensor, Biomimetic