Determination of intrinsic stresses in textured and epitaxial TiN thin films deposited by dual ion beam sputtering

G Abadias, Yau Tse

Research output: Contribution to journal › Article

21 Citations (Scopus)

Original language	English
Pages (from-to)	33-40
Number of pages	8
Journal	Surface and Coatings Technology
Volume	180-181
DOIs	https://doi.org/10.1016/j.surfcoat.2003.10.137
Publication status	Published - 1 Mar 2004

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title = "Determination of intrinsic stresses in textured and epitaxial TiN thin films deposited by dual ion beam sputtering",

author = "G Abadias and Yau Tse",

year = "2004",

month = mar,

day = "1",

doi = "10.1016/j.surfcoat.2003.10.137",

language = "English",

volume = "180-181",

pages = "33--40",

journal = "Surface and Coatings Technology",

publisher = "Elsevier Korea",

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TY - JOUR

T1 - Determination of intrinsic stresses in textured and epitaxial TiN thin films deposited by dual ion beam sputtering

AU - Abadias, G

AU - Tse, Yau

PY - 2004/3/1

Y1 - 2004/3/1

U2 - 10.1016/j.surfcoat.2003.10.137

DO - 10.1016/j.surfcoat.2003.10.137

M3 - Article

VL - 180-181

SP - 33

EP - 40

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -