| Original language | English |
|---|---|
| Publication status | Published - 1 Sept 2001 |
| Event | Proceedings of MEMS Conference - Duration: 1 Sept 2001 → … |
Conference
| Conference | Proceedings of MEMS Conference |
|---|---|
| Period | 1/09/01 → … |
Design and analysis of a micro receiprocating engine for the time multiplexed deep etching process
Kyle Jiang, H Yang, Philip Prewett
Research output: Contribution to conference (unpublished) › Paper