Deflection and load characterisation of bimorph actuators for bioMEMS and other applications

Research output: Contribution to journalArticle

Authors

Colleges, School and Institutes

Abstract

This work is concerned with the performance evaluation of thermally activated bimorph cantilevers. A range of cantilevers has been fabricated using state of the art microfabrication techniques. The cantilevers are 600 mum long and have initial (non-resonant) displacement of 250 mum. Following the successful fabrication of wafer-scale bimorph cantilevers thermal/mechanical tests have been carried out under loaded and non-loaded conditions. Such cantilevers may have applications as actuators, biosensors, and micromixers. (C) 2004 Elsevier B.V. All rights reserved.

Details

Original languageEnglish
Pages (from-to)898-903
Number of pages6
JournalMicroelectronic Engineering
Volume73-74
Publication statusPublished - 1 Jun 2004

Keywords

  • bimorph, micro-thermal actuator, microactuator, BioMEMS actuators