Deflection and load characterisation of bimorph actuators for bioMEMS and other applications
Research output: Contribution to journal › Article
Colleges, School and Institutes
This work is concerned with the performance evaluation of thermally activated bimorph cantilevers. A range of cantilevers has been fabricated using state of the art microfabrication techniques. The cantilevers are 600 mum long and have initial (non-resonant) displacement of 250 mum. Following the successful fabrication of wafer-scale bimorph cantilevers thermal/mechanical tests have been carried out under loaded and non-loaded conditions. Such cantilevers may have applications as actuators, biosensors, and micromixers. (C) 2004 Elsevier B.V. All rights reserved.
|Number of pages||6|
|Publication status||Published - 1 Jun 2004|
- bimorph, micro-thermal actuator, microactuator, BioMEMS actuators