Comparison of Techniques for Microwave Characterization of BST Thin Films

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Colleges, School and Institutes


Various techniques involving coplanar waveguide transmission lines, coplanar resonators, and interdigital capacitors, have been employed to characterize the dielectric properties of Ba0.05Sr0.95TiO3 thin films at cryogenic conditions. The devices were patterned from a high-temperature superconductor deposited on top of a single Ba0.05Sr0.95TiO3 thin film. The measurements from these various techniques show a good agreement.


Original languageEnglish
Pages (from-to)397-401
Number of pages5
JournalIEEE Transactions on Microwave Theory and Techniques
Issue number2
Publication statusPublished - 1 Feb 2007


  • barium-strontium-titanate (BST), coplanar waveguide (CPW), interdigital capacitor (IDC), coplanar resonator (CPR)