Comparison of scanning evanescent microwave microscopy with co-planar waveguide methods of characterization of BaSr TiO thin films

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Comparison of scanning evanescent microwave microscopy with co-planar waveguide methods of characterization of BaSr TiO thin films. / Barker, D.J.; Suherman, P.M.; Jackson, T.J.; Lancaster, M.J.

IEEE International Symposium on Applications of Ferroelectrics. 2009.

Research output: Chapter in Book/Report/Conference proceedingChapter

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@inbook{30ac4e9ffc70486a843eaea35593e339,
title = "Comparison of scanning evanescent microwave microscopy with co-planar waveguide methods of characterization of BaSr TiO thin films",
abstract = "The permittivity of a barium strontium titanate thin film was measured at 1.8 GHz and 4.4 GHz with a scanning evanescent microwave microscope (SEMM) and co-planer waveguides (CPW). The raw data suggests the SEMM has sufficient sensitivity to detect significant variations in permittivity across the film that the CPWs could not. The average value of permittivity extracted from the data is consistent with that extracted from the co-planar waveguide measurements but the error bars associated with the extraction are large, of the order of 25 %. The significant contribution to the error in the final result from the SEMM is due to the analytical model used.",
author = "D.J. Barker and P.M. Suherman and T.J. Jackson and M.J. Lancaster",
year = "2009",
month = jan,
day = "1",
language = "English",
isbn = "9781424449699",
booktitle = "IEEE International Symposium on Applications of Ferroelectrics",

}

RIS

TY - CHAP

T1 - Comparison of scanning evanescent microwave microscopy with co-planar waveguide methods of characterization of BaSr TiO thin films

AU - Barker, D.J.

AU - Suherman, P.M.

AU - Jackson, T.J.

AU - Lancaster, M.J.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - The permittivity of a barium strontium titanate thin film was measured at 1.8 GHz and 4.4 GHz with a scanning evanescent microwave microscope (SEMM) and co-planer waveguides (CPW). The raw data suggests the SEMM has sufficient sensitivity to detect significant variations in permittivity across the film that the CPWs could not. The average value of permittivity extracted from the data is consistent with that extracted from the co-planar waveguide measurements but the error bars associated with the extraction are large, of the order of 25 %. The significant contribution to the error in the final result from the SEMM is due to the analytical model used.

AB - The permittivity of a barium strontium titanate thin film was measured at 1.8 GHz and 4.4 GHz with a scanning evanescent microwave microscope (SEMM) and co-planer waveguides (CPW). The raw data suggests the SEMM has sufficient sensitivity to detect significant variations in permittivity across the film that the CPWs could not. The average value of permittivity extracted from the data is consistent with that extracted from the co-planar waveguide measurements but the error bars associated with the extraction are large, of the order of 25 %. The significant contribution to the error in the final result from the SEMM is due to the analytical model used.

M3 - Chapter

AN - SCOPUS:74349113978

SN - 9781424449699

BT - IEEE International Symposium on Applications of Ferroelectrics

ER -