Original language | English |
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Journal | Journal Vac. Sci. Technol. B |
Publication status | Published - 1 Jan 2005 |
Chemically amplified polysubstituted triphenylene derivatives as high sensitivity electron-beam resists
Hasnah Mohd Zaid, Alexander Robinson, Richard Palmer, Mayandithevar Manickam, Jon Preece
Research output: Contribution to journal › Article