Chemically amplified polysubstituted triphenylene derivatives as high sensitivity electron-beam resists

Hasnah Mohd Zaid, Alexander Robinson, Richard Palmer, Mayandithevar Manickam, Jon Preece

Research output: Contribution to journalArticle

Original languageEnglish
JournalJournal Vac. Sci. Technol. B
Publication statusPublished - 1 Jan 2005

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