Chemically amplified molecular resists for electron beam lithography

Research output: Contribution to journalArticlepeer-review

Authors

  • H.M. Zaid
  • F.P. Gibbons
  • R. Brainard
  • T. Zampini
  • K. O'Connell

Colleges, School and Institutes

Details

Original languageUndefined/Unknown
JournalMicroelectronic Engineering
Publication statusPublished - 2006