Chemically amplified molecular resists for E-beam lithography

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Colleges, School and Institutes

Details

Original languageUndefined/Unknown
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Publication statusPublished - 2007