Characterization of surface properties of ordered nanostructures using SEM stereoscopic technique

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Colleges, School and Institutes


In this paper, a low-cost and high-throughput method for fabrication of large area ordered nanostructure is presented and the obtained structures are characterized using SEM stereoscopic technique for 3D-reconstruction of nanostructures to calculate the surface properties. The results show two kinds of deformations, including narrow waves of the surface, due to the embedment of nanospheres to the photoresist, and irregular ups and downs in surface structure, which could be caused by fabrication process faults. This approach provides a simple and efficient way to measure the morphological parameters in flat nanometre-sized structures. (C) 2010 Elsevier B.V. All rights reserved.


Original languageEnglish
Pages (from-to)2687-2690
Number of pages4
JournalMicroelectronic Engineering
Issue number8
Publication statusPublished - 1 Aug 2011


  • SEM stereoscopic technique, Nanosphere photolithography, 3D-reconstruction, Nanostructures