Alumina composite suspension preparation for softlithography microfabrication

Research output: Contribution to journalArticlepeer-review

Colleges, School and Institutes

Abstract

This paper reports a preparation process of alumina suspension for microfabrication of nanoparticle-alumina composites. A preceramic coating resin (PCR) was used both as binder instead of traditionally organic binders and as an additive of SiC or SiN or both. The gravity-settling behaviour of the AlO/acetonitrile suspensions has been characterized with varying poly vinyl pyrrolidone (PVP) concentration. Appropriate PCR amount and optimized curing conditions have been found and proven to be successful in achieving dense and uniform green and sintered microcomponents. The optimal parameters of alumina composite suspension for mould filling are achieved as PVP concentration in acetonitrile = 0.1 g/ml, minimum amount of PCR = 18%, and solid loading = 60 wt.%.

Details

Original languageEnglish
Pages (from-to)929-932
Number of pages4
JournalMicroelectronic Engineering
Volume86
Issue number4-6
Publication statusPublished - 1 Apr 2009