A triphenylene derivative as a novel negative/positive tone resist of 10 nanometer resolution

Research output: Contribution to conference (unpublished)Paper

Details

Original languageEnglish
Pages425-428
Number of pages4
Publication statusPublished - 1 Jun 2000
Event25th International Conference on Micro- and Nano-Engineering, Sep 21-23, 1999. ROME, Italy -
Duration: 1 Jun 2000 → …

Conference

Conference25th International Conference on Micro- and Nano-Engineering, Sep 21-23, 1999. ROME, Italy
Period1/06/00 → …