A SU8 micromachined WR-1.5 band waveguide filter
Research output: Contribution to journal › Article › peer-review
Colleges, School and Institutes
- AGILENT TECHNOLOGIES UK LTD
A WR-1.5 band (500-750 GHz) waveguide 3rd order bandpass filter has been designed, fabricated, using SU8 photoresist technology, tested and presented. The filter is composed of three silver-coated SU8 layers, each of the same nominal thickness of 191 μ m. This filter structure is based on three offset resonators. This novel structure is ideally suitable for the layered SU8 micromachining process. The filter exhibits a 53.7 GHz 3-dB bandwidth at a central frequency of 671 GHz. The median passband insertion loss is measured to be 0.65 dB and the return loss is better than 11 dB over the whole passband.
|Number of pages||3|
|Journal||IEEE Microwave and Wireless Components Letters|
|Publication status||Published - 1 Jan 2013|