A novel MOEMS based adaptive optic for X-ray focusing
Research output: Contribution to journal › Article
Colleges, School and Institutes
This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved.
|Number of pages||5|
|Publication status||Published - 1 Apr 2006|
- adaptive optics, MOEMS, MOXI, novel X-ray optics