A novel MOEMS based adaptive optic for X-ray focusing

Research output: Contribution to journalArticle


Colleges, School and Institutes


This work presents the design and micro fabrication of a novel X-ray micro-optical system for use in an X-ray microprobe for analysis of biological cells. A reflective microoptoelectromechanical system capable of focusing a wide range of wavelengths has been developed. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and for system calibration. (c) 2006 Elsevier B.V. All rights reserved.


Original languageEnglish
Pages (from-to)1321-1325
Number of pages5
JournalMicroelectronic Engineering
Publication statusPublished - 1 Apr 2006


  • adaptive optics, MOEMS, MOXI, novel X-ray optics