A DRIE based EDM process for metallic microcomponent fabrication

J Li, Kyle Jiang, Graham Davies

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Pages	402-411
Number of pages	10
Publication status	Published - 25 Nov 2005
Event	Proceedings of 2005 Lamdamap International Conference - Duration: 25 Nov 2005 → …

Conference	Proceedings of 2005 Lamdamap International Conference
Period	25/11/05 → …

Cite this

@conference{3db7d3ae3f454b4b96427a41a7d46232,

title = "A DRIE based EDM process for metallic microcomponent fabrication",

author = "J Li and Kyle Jiang and Graham Davies",

year = "2005",

month = nov,

day = "25",

language = "English",

pages = "402--411",

note = "Proceedings of 2005 Lamdamap International Conference ; Conference date: 25-11-2005",

}