100 GHz ultra-high Q-factor photonic crystal resonators

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100 GHz ultra-high Q-factor photonic crystal resonators. / Otter, William J.; Hanham, Stephen; Ridler, Nick M.; Marino, Giuseppe; Klein, Norbert; Lucyszyn, Stepan.

In: Sensors and Actuators, A: Physical, Vol. 217, 15.09.2014, p. 151-159.

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Otter, William J. ; Hanham, Stephen ; Ridler, Nick M. ; Marino, Giuseppe ; Klein, Norbert ; Lucyszyn, Stepan. / 100 GHz ultra-high Q-factor photonic crystal resonators. In: Sensors and Actuators, A: Physical. 2014 ; Vol. 217. pp. 151-159.

Bibtex

@article{31ee8b6e10594e89bdd8b91f5ee991d2,
title = "100 GHz ultra-high Q-factor photonic crystal resonators",
abstract = "We demonstrate an ultra-high Q-factor photonic crystal resonator operating in the millimeter-wave band, which is suitable for use as an integrated sensing platform. Experimental results show that at 100 GHz a loaded Q-factor of 5 000 and 8 700 can be achieved with a strongly and weakly coupled cavity design, respectively. The uncertainty in the experimental results has been analyzed and a new technique of propagating uncertainty in S-parameter measurements for the determination of Q-factor is given. The result of this uncertainty analysis gives an unloaded Q-factor of 9 040 ± 300; being fundamentally limited to ∼10 000 by the intrinsic dielectric loss of the high resistivity silicon substrate. Utilizing standard bulk-micromachining of silicon, the resonators can be monolithically integrated into RFICs and MMICs for applications including liquid and gas sensing.",
keywords = "Bulk micromachining, Electromagnetic band gap, Photonic crystal, Q-factor, Resonator, Silicon",
author = "Otter, {William J.} and Stephen Hanham and Ridler, {Nick M.} and Giuseppe Marino and Norbert Klein and Stepan Lucyszyn",
year = "2014",
month = sep,
day = "15",
doi = "10.1016/j.sna.2014.06.022",
language = "English",
volume = "217",
pages = "151--159",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

RIS

TY - JOUR

T1 - 100 GHz ultra-high Q-factor photonic crystal resonators

AU - Otter, William J.

AU - Hanham, Stephen

AU - Ridler, Nick M.

AU - Marino, Giuseppe

AU - Klein, Norbert

AU - Lucyszyn, Stepan

PY - 2014/9/15

Y1 - 2014/9/15

N2 - We demonstrate an ultra-high Q-factor photonic crystal resonator operating in the millimeter-wave band, which is suitable for use as an integrated sensing platform. Experimental results show that at 100 GHz a loaded Q-factor of 5 000 and 8 700 can be achieved with a strongly and weakly coupled cavity design, respectively. The uncertainty in the experimental results has been analyzed and a new technique of propagating uncertainty in S-parameter measurements for the determination of Q-factor is given. The result of this uncertainty analysis gives an unloaded Q-factor of 9 040 ± 300; being fundamentally limited to ∼10 000 by the intrinsic dielectric loss of the high resistivity silicon substrate. Utilizing standard bulk-micromachining of silicon, the resonators can be monolithically integrated into RFICs and MMICs for applications including liquid and gas sensing.

AB - We demonstrate an ultra-high Q-factor photonic crystal resonator operating in the millimeter-wave band, which is suitable for use as an integrated sensing platform. Experimental results show that at 100 GHz a loaded Q-factor of 5 000 and 8 700 can be achieved with a strongly and weakly coupled cavity design, respectively. The uncertainty in the experimental results has been analyzed and a new technique of propagating uncertainty in S-parameter measurements for the determination of Q-factor is given. The result of this uncertainty analysis gives an unloaded Q-factor of 9 040 ± 300; being fundamentally limited to ∼10 000 by the intrinsic dielectric loss of the high resistivity silicon substrate. Utilizing standard bulk-micromachining of silicon, the resonators can be monolithically integrated into RFICs and MMICs for applications including liquid and gas sensing.

KW - Bulk micromachining

KW - Electromagnetic band gap

KW - Photonic crystal

KW - Q-factor

KW - Resonator

KW - Silicon

UR - http://www.scopus.com/inward/record.url?scp=84905392520&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2014.06.022

DO - 10.1016/j.sna.2014.06.022

M3 - Article

AN - SCOPUS:84905392520

VL - 217

SP - 151

EP - 159

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

ER -