100 GHz ultra-high Q-factor photonic crystal resonators
Research output: Contribution to journal › Article › peer-review
Authors
Colleges, School and Institutes
External organisations
- Imperial College London
- Università degli Studi di Catania, Italy
- National Physical Laboratory
Abstract
We demonstrate an ultra-high Q-factor photonic crystal resonator operating in the millimeter-wave band, which is suitable for use as an integrated sensing platform. Experimental results show that at 100 GHz a loaded Q-factor of 5 000 and 8 700 can be achieved with a strongly and weakly coupled cavity design, respectively. The uncertainty in the experimental results has been analyzed and a new technique of propagating uncertainty in S-parameter measurements for the determination of Q-factor is given. The result of this uncertainty analysis gives an unloaded Q-factor of 9 040 ± 300; being fundamentally limited to ∼10 000 by the intrinsic dielectric loss of the high resistivity silicon substrate. Utilizing standard bulk-micromachining of silicon, the resonators can be monolithically integrated into RFICs and MMICs for applications including liquid and gas sensing.
Details
Original language | English |
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Pages (from-to) | 151-159 |
Number of pages | 9 |
Journal | Sensors and Actuators, A: Physical |
Volume | 217 |
Early online date | 11 Jul 2014 |
Publication status | Published - 15 Sep 2014 |
Keywords
- Bulk micromachining, Electromagnetic band gap, Photonic crystal, Q-factor, Resonator, Silicon