Project Details
Short title | Sensitivity Enhancement and Adaptation of Various Process Steps on High Resoulution E-Beam Resists |
---|---|
Status | Finished |
Effective start/end date | 1/04/02 → 31/12/04 |
Funding
- ROHM & HAAS ELECTRONIC MATERIALS
Short title | Sensitivity Enhancement and Adaptation of Various Process Steps on High Resoulution E-Beam Resists |
---|---|
Status | Finished |
Effective start/end date | 1/04/02 → 31/12/04 |