FASTSTREAM: Feasibility Study on Fabrication of a Micro Engine Using Deep Etching Processes of MEMS Technologies

  • Jiang, Kyle (Principal Investigator)
  • Prewett, Phil (Co-Investigator)
  • Ward, Michael (Co-Investigator)

Project Details

Short titleFASTSTREAM: Feasibility Study on Fabrication of a Micro Engine Using Deep Etching Processes of MEMS Technologies
StatusFinished
Effective start/end date1/01/02 → 30/06/03

Funding

  • Engineering & Physical Science Research Council