Rebecca Palmer

(Former)

Publications

  1. 2013
  2. Published
  3. 2012
  4. Published

    Positive tone chemically amplified fullerene resist

    Andreas Frommhold, , , Mayandithevar Manickam, Jon Preece, Rebecca Palmer & Alex Robinson, 2012, Proceedings of SPIE - The International Society for Optical Engineering.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  5. 2011
  6. Published

    Plasma etching of high-resolution features in a fullerene molecular resist

    Mayandithevar Manickam, Jon Preece, Rebecca Palmer & Alex Robinson, 2011, Proceedings of SPIE - The International Society for Optical Engineering.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  7. 2009
  8. Published

    Low activation energy fullerene molecular resist

    Mayandithevar Manickam, Jon Preece, Rebecca Palmer & Alex Robinson, 2009, Proceedings of SPIE - The International Society for Optical Engineering.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  9. 2008
  10. Published

    Chemically amplified fullerene resists for e-beam lithography

    Sara Diegoli, Mayandithevar Manickam, Jon Preece, Rebecca Palmer & Alex Robinson, 2008, Proceedings of SPIE - The International Society for Optical Engineering.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  11. Published
  12. 2007
  13. Published

    Chemically amplified molecular resists for E-beam lithography

    Sara Diegoli, Mayandithevar Manickam, Jon Preece, Rebecca Palmer & Alex Robinson, 2007, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  14. 2006
  15. Published
  16. 1998
  17. Published

    A Fullerene derivative as an electron beam resist for nanolithography

    Alex Robinson, Rebecca Palmer, , & Jon Preece, 1998, In: Applied Physics Letters.

    Research output: Contribution to journalArticlepeer-review